In:
High Power Laser and Particle Beams, Shanghai Institute of Optics and Fine Mechanics, Vol. 27, No. 2 ( 2015), p. 24103-
Type of Medium:
Online Resource
ISSN:
1001-4322
Uniform Title:
基于NOA73微球与SU-8微柱的微探针制作
DOI:
10.3788/HPLPB/2015/27/2
DOI:
10.3788/HPLPB20152702.24103
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2015
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