In:
MRS Proceedings, Springer Science and Business Media LLC, Vol. 341 ( 1994)
Abstract:
PLZT thin films from a stoichiometric (9/65/35) commercial target were laser deposited using the second and third harmonics of a nanosecond Nd:YAG laser. The films were grown on oriented sapphire substrates and analysed by X-ray diffraction, SEM and EDX techniques. The influence of the deposition parameters laser fluence and substrate temperature on the physical characteristics of the films is presented.
Type of Medium:
Online Resource
ISSN:
0272-9172
,
1946-4274
DOI:
10.1557/PROC-341-303
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
1994
detail.hit.zdb_id:
605289-7
detail.hit.zdb_id:
2451008-7
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