In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 5, No. 2 ( 1987-03-01), p. 262-264
Abstract:
Outgassing rates of A6063-EX aluminum alloy and SUS 304 stainless steel, in the form of a vacuum chamber, before and after filling the chambers with water were compared. The results showed that the outgassing rate of the aluminum alloy was greater than that of the stainless steel before baking. However, after in situ vacuum bakeout, the outgassing rate of the aluminum alloy became lower than that of the stainless steel, even for the chamber which had been filled with water. The Auger depth profile analysis reveals that the surface of the aluminum alloy, before bakeout, may have a porous aluminum oxide layer which increases the amount of the adsorbed gas molecules resulting in a large outgassing rate.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1987
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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