In:
Review of Scientific Instruments, AIP Publishing, Vol. 78, No. 12 ( 2007-12-01)
Abstract:
A handheld x-ray spectrometer has been realized and tested. The purpose of the device is to measure the thickness of coated samples in the range of 1–1500nm in an industrial environment. Accuracy of ∼3% has been achieved in this range with a measurement time of 1min. Automated software has been implemented to allow utilization by a nonspecialist operator. An automated calibration procedure, based on measurements of reference samples, is used.
Type of Medium:
Online Resource
ISSN:
0034-6748
,
1089-7623
Language:
English
Publisher:
AIP Publishing
Publication Date:
2007
detail.hit.zdb_id:
209865-9
detail.hit.zdb_id:
1472905-2
SSG:
11
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