In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 25, No. 6 ( 2007-11-01), p. 2654-2657
Abstract:
Plastic nanowire-grid polarizers based on small period, 58 and 75nm half-pitch, Al gratings are fabricated and studied. Al gratings are made by coating Al on the polymer grating sidewalls at oblique angles. The nanopolymer gratings on plastic film over large area are made by nanoimprint lithography. By optimizing the grating period, grating linewidth, Al coating depth, and thickness, excellent maximum transmittance (Tmax) (80%–90%) and extinction ratio (∼30dB) are achieved.
Type of Medium:
Online Resource
ISSN:
1071-1023
,
1520-8567
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2007
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
3117333-0
detail.hit.zdb_id:
1475429-0
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