Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
69 (1996), S. 1743-1745
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
It is demonstrated that relaxed Si1−xGex of 0≤x≤0.25 grown by molecular beam epitaxy, using the compositional grading technique, can be doped with gold by a high-temperature indiffusion process from a deposited gold layer. Substitutional gold in both p- and n-type alloy layers has been identified and characterized by deep level transient spectroscopy, and the donor and acceptor levels of neutral, substitutional gold in the SiGe alloys were studied as a function of the Ge content. The data suggest that both the donor and acceptor levels are pinned to the conduction band. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.117471
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