In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 24, No. 5 ( 2006-09-01), p. 1702-1705
Abstract:
We describe a vibratory vacuum gauge in which a small force due to high-frequency compression of a gas excites a planar mechanical oscillator. Compared to vibratory viscosity gauges, this principle allows operation at lower pressures. With a prototype apparatus we demonstrate sensitivity from 105to10−4Pa for argon, nitrogen, and helium. A simple theory for the device is presented which gives an account of the pressure and molecular weight dependence of the response in the molecular flow regime.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2006
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
Permalink