In:
ACTA PHOTONICA SINICA, Shanghai Institute of Optics and Fine Mechanics, Vol. 52, No. 1 ( 2023), p. 0112001-
Type of Medium:
Online Resource
ISSN:
1004-4213
Uniform Title:
Simulation and Analysis of Low-coherence Micro-interference Signal with High Aspect Ratio Trench Structure Based on FDTD
DOI:
10.3788/gzxb/2023/52/1
DOI:
10.3788/gzxb20235201.0112001
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2023
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