In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 16, No. 3 ( 2018), p. 032201-
Type of Medium:
Online Resource
ISSN:
1671-7694
Uniform Title:
Useful way to compensate for intrinsic birefringence caused by calcium fluoride in optical lithography systems
DOI:
10.3788/COL/2018/16/3
DOI:
10.3788/COL201816.032201
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2018
detail.hit.zdb_id:
2114192-7
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