In:
ECS Transactions, The Electrochemical Society, Vol. 11, No. 7 ( 2007-09-28), p. 131-136
Abstract:
Novel strontium precursor - bis(1-methoxy-2,2,6,6-tetramethyl-3,5-heptanedionato)strontium (Sr(MTHD)2) - was prepared and its deposition properties were evaluated.High vapor pressure and excellent conformality of Sr(MTHD)2 make it promising candidate for ALD precursor to deposit high-k dielectric materials such as SrTiO3.
Type of Medium:
Online Resource
ISSN:
1938-5862
,
1938-6737
Language:
Unknown
Publisher:
The Electrochemical Society
Publication Date:
2007
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