In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 31, No. 2 ( 2021-02-01), p. 025003-
Abstract:
This work presents three new narrowband radio frequency
(RF) microelectromechanical systems (MEMS) filters made from mechanical or electrically coupled resonators with a q uality factor Q of over 10 000. A low-stiffness rectangular-frame mechanical coupling beam (RFCB) is designed, and a filter with an RFCB is successfully developed with a center frequency of 75.5 MHz and a percent bandwidth (BW) of 0.4%. In addition, a tunable narrowband filter is achieved with a mechanically coupled four-disk linear structure filter. The center frequencies are 74.47 ± 0.54 MHz and the percent BW range is 0.48%–2.2%. In order to further simplify the architecture of the filter, a filter based on a single whisper gallery mode disk resonator is demonstrated, which has a center frequency of 79.42 MHz and a BW of only 0.25%. The three different RF MEMS filters have potential applications in wireless communication systems.
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/abcdad
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2021
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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