In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 31, No. 5 ( 2021-05-01), p. 055006-
Abstract:
This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from −20° to 20°, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from −20° to 20°, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16° h −1 and ARW of 0.011° (√h) −1 . Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/abec1b
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2021
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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