In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 28, No. 7 ( 2022-07), p. 1607-1619
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-022-05284-x
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2022
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X
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