In:
Surface and Interface Analysis, Wiley, Vol. 37, No. 2 ( 2005-02), p. 181-184
Abstract:
The development of highly reflective multilayer mirrors for use in the wavelength region around 6 nm has made it possible to use a multilayer‐coated Schwarzschild objective for micro‐x‐ray photoemission spectroscopy. For this purpose, Co x Cr 1− x /C and W/C multilayers were fabricated by magnetron sputtering and the soft x‐ray reflectivities were measured. The peak reflectivity of the Cr/C multilayer was found to be the highest with ∼18.9% at a wavelength of 6.42 nm and an incident angle of 88°. It is believed that a Cr/C multilayer will provide sufficient performance for use on a Schwarzschild mirror for x‐ray photoemission spectroscopy using 6 nm x‐rays. Copyright © 2005 John Wiley & Sons, Ltd.
Type of Medium:
Online Resource
ISSN:
0142-2421
,
1096-9918
Language:
English
Publisher:
Wiley
Publication Date:
2005
detail.hit.zdb_id:
2023881-2
Permalink