In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 12, No. 5 ( 2002-9-1), p. 696-701
Type of Medium:
Online Resource
ISSN:
0960-1317
DOI:
10.1088/0960-1317/12/5/328
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2002
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1
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