In:
Surface and Interface Analysis, Wiley, Vol. 43, No. 1-2 ( 2011-01), p. 669-672
Abstract:
A quantitative SIMS approach using MCs + mode has been tested on boron carbonitride type films (BCN). Thick amorphous B x C y N z films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in‐depth secondary ion mass spectroscopy analyses and compositions determined by X‐ray photoelectron spectroscopy. The matrix intensity ratios I(CCs + )/I(BCs + ) and I(CCs 2 + )/I(BCs 2 + ) appear linear with the concentration ratios C C :C B ; ratios of I(NCs + )/I(BCs + ) and I(NCs 2 + )/I(BCs 2 + ) appear linear with the concentration ratio C N :C B as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films. Copyright © 2010 John Wiley & Sons, Ltd.
Type of Medium:
Online Resource
ISSN:
0142-2421
,
1096-9918
Language:
English
Publisher:
Wiley
Publication Date:
2011
detail.hit.zdb_id:
2023881-2
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