In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 37, No. 6 ( 2019-11-01)
Abstract:
An approach to achieve uniform and smooth molybdenum (Mo) film on a BK7 glass plate at room temperature is proposed through picosecond pulsed laser deposition, with the pulsed laser radiating the target along a linear track. A numerical model is established to analyze the influence of linear scanning offsets on the thickness homogeneity of the deposited thin film. Through an appropriate choice of radiation intensity and scanning parameters, a uniform and smooth layer of Mo thin film is prepared with its maximum thickness variation and root-mean-square roughness better than 5% and 1.2 nm, respectively.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2019
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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