In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 15, No. 3 ( 1997-05-01), p. 946-950
Abstract:
A dual-cathode, unbalanced dc magnetron sputtering system was used to grow CNx/ZrN multilayers on Si and polished M1 steel substrates at ambient temperature. Nanoindentation results showed that, under apprepriate conditions, it is possible to get CNx/ZrN multilayer coatings with hardness in the 50 GPa regime and modulus up to 410 GPa. X-ray diffraction studies revealed a strong correlation between hardness and the occurrence of (111) texture of ZrN. Cross-sectional transmission electron microscopy showed a high degree of crystallinity throughout the coating without obvious voids. These multilayers are crystalline only at small bilayer thicknesses on the order of 2 nm.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1997
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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