In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 62, No. SF ( 2023-06-01), p. SF1012-
Abstract:
ScAlMgO 4 (SAM) substrates have a trigonal structure with high cleavability in the c-plane. Because this substrate can be easily cleaved, gallium oxide (Ga 2 O 3 ) can be grown on the SAM substrate, and the difficulty in the heat dissipation of Ga 2 O 3 may be solved. Therefore, in this study, we performed Ga 2 O 3 growth on a SAM substrate using mist-chemical vapor deposition. When the growth temperature was varied at 500 °C, 600 °C, and 700 °C, ε -Ga 2 O 3 (004) grew dominantly, and the crystallinity improved with increasing temperature. Moreover, the grown ε -Ga 2 O 3 had orthorhombic structure and formed rotational domains. Furthermore, a phase transition to β -Ga 2 O 3 was achieved by annealing the resulting ε -Ga 2 O 3 on the SAM substrates. We also succeeded in separating the SAM substrates on which the Ga 2 O 3 thin films were grown.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.35848/1347-4065/acbf5a
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2023
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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