In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 5R ( 1996-05-01), p. 2782-
Kurzfassung:
Thin films of AlN were prepared on (012) sapphire substrates by chemical vapor deposition using AlCl 3 , NH 3 , H 2 and N 2 gases. Crystal orientations, surface microstructures, oxygen impurity contents of the films and surface acoustic wave (SAW) properties determined using an interdigital transducer were investigated. Under optimized conditions, epitaxial AlN films were deposited and crystal orientation of AlN films increased as the thickness of the films increased. Oxygen impurity contents were less than 1 atm%. The dependence of SAW velocity along the [001] AlN axis on the film thickness was in good agreement with the theoretical prediction and the temperature coefficients of the center frequency increased as the film thickness increased. These tendencies are considered to be explained by the high crystal orientation and low oxygen impurity content of AlN epitaxial films.
Materialart:
Online-Ressource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.2782
Sprache:
Unbekannt
Verlag:
IOP Publishing
Publikationsdatum:
1996
ZDB Id:
218223-3
ZDB Id:
797294-5
ZDB Id:
2006801-3
ZDB Id:
797295-7
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