In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 34, No. 3 ( 2016-05-01)
Abstract:
In the secondary ion mass spectrometry, cluster ion beams are used for efficient ionization and low-damage etching of organic materials. In earlier studies, the authors have suggested a new cluster ion beam method using electrospray droplet impacts in atmospheric pressure conditions. Recently, the authors have developed a technique for electrospraying aqueous solutions in vacuum, which improved the performance of this technique for practical use. In this study, the mass-to-charge (m/z) values of the electrospray droplets produced by vacuum electrospray were measured by the time-of-flight technique and were found to be between 103 and 106. In addition, the secondary ions produced by these droplets were measured on indium and arginine samples, and the effect that the m/z value of the primary droplets has upon the secondary ion emission was investigated.
Type of Medium:
Online Resource
ISSN:
2166-2746
,
2166-2754
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2016
detail.hit.zdb_id:
3117331-7
detail.hit.zdb_id:
1475429-0
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