In:
Pure and Applied Chemistry, Walter de Gruyter GmbH, Vol. 74, No. 3 ( 2002-01-01), p. 459-464
Abstract:
Emission spectroscopy is used to investigate the effect of inert gas mixing in nitrogen plasmas generated in inductively coupled plasma (ICP) and electron cyclotron resonance (ECR) plasma sources. Vacuum ultraviolet (VUV) emission of resonance lines is used to determine concentration of atomic nitrogen while electron temperature is obtained from optical emission spectra. It is found that electron temperature can be either raised or reduced effectively by mixing helium or argon in a nitrogen discharge. Electron-electron collisions and superelastic collisions involving metastable species are key factors in electron temperature tuning.
Type of Medium:
Online Resource
ISSN:
1365-3075
,
0033-4545
DOI:
10.1351/pac200274030459
Language:
English
Publisher:
Walter de Gruyter GmbH
Publication Date:
2002
detail.hit.zdb_id:
2022101-0
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