In:
Pure and Applied Chemistry, Walter de Gruyter GmbH, Vol. 74, No. 3 ( 2002-01-01), p. 407-411
Abstract:
In this work, we report on our last results concerning the polyethyleneterephtalate barrier performance optimization as a function of the chemistry of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed plasmas ignited in an RF capacitively coupled parallel plates reactor. The influence of the gas feed composition and power on the plasma phase/coating chemistry and on the O2 gas transmission rate has been investigated. The plasma phase has been studied by means of Fourier transform infrared absorption (FT-IR) and optical emission spectroscopies (OES), and the results have been coupled to the film chemistry investigated by means of FT-IR spectroscopy. These techniques show excellent potentialities in the correlation of the plasma phase and film chemistries with the barrier properties of the SiOx-coated polymer, especially when a very good barrier level is required.
Type of Medium:
Online Resource
ISSN:
1365-3075
,
0033-4545
DOI:
10.1351/pac200274030407
Language:
English
Publisher:
Walter de Gruyter GmbH
Publication Date:
2002
detail.hit.zdb_id:
2022101-0
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