ISSN:
1572-8986
Keywords:
Microwave plasma
;
surface-wave discharge
;
Stark broadening
;
argon plasma
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract The electron density of microwave-generated surface-wave discharges in argon have been measured using Stark broadening and calculated from the measured wavelengths of the standing surface wave. Results obtained from these two techniques compare well. The electron density varies from 1013 to 1014/cm3 for pressures ranging from 50 to 800 torr.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00615124
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