ISSN:
1573-4854
Keywords:
X-ray reflectivity
;
anodic oxide
;
oscillations
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Present work reports a study of the morphology of thin (50–600 Å) porous oxides of silicon grown in a special regime of the oscillating anodic potential. X-ray reflectivity (in-situ and ex-situ) was applied to analyze the morphology of oxides. It has been established that there is a direct correlation between a number of oscillations of potential during the oxide growth and the structure of oxide: it has a multi-layer structure with the number of layers corresponding to the number of oscillations. The results are interpreted using the model of the porous structures formation which explains the oscillatory oxide formation kinetics in terms of alternating processes of oxide formation and dissolution.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1009679432364
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