In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 4S ( 2000-04-01), p. 2026-
Abstract:
The Monte Carlo sphere model is extended to deal with the
extrinsic time-dependent-dielectric-breakdown (TDDB) by incorporating the well-known “effective oxide thinning”
concept. Percolation simulation, based on this model for the first
time, evidences that the process defects induced extrinsic TDDB is also statistical in nature as is the intrinsic one, and is
characterized by a probability function defining local oxide thinning. The experimental bimodal or even multimodal characteristics
can be reproduced accordingly. Furthermore, the simulation results in the extrinsic regime are found to be sample-size (i.e., the total
number of samples that span the breakdown statistics) dependent, suggesting that care should be taken when evaluating the extrinsic
TDDB data in a real manufacturing process.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.2026
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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