In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 61, No. 11 ( 2022-11-01), p. 114001-
Abstract:
This paper reports on a design journey for a laterally-excited bulk acoustic wave resonator (XBAR) with an adjustable piezoelectric coupling coefficient ( K 2 ). The vibration principle and resonant characteristics of XBAR are investigated by theoretical and simulation analysis, and the way to adjust K 2 by introducing two grooves in the area between interdigital electrodes (IDEs) is proved to be effective by using the finite-element method (FEM) simulation and the Modified Butterworth–Van Dyke model with series capacitor C r (MBVD- C r ) first, and then the impact of groove depth ( H g ) and groove width ( W g ) on K 2 of XBAR is theoretically analyzed. Specifically, K 2 can be effectively adjusted by setting different values of H g and W g . After optimization, the maximum regulation range of K 2 is from 2.02% to 45.05%. The fluted XBAR has remarkable potential in building an XBAR bandpass filter for specific frequency bands, which greatly optimizes the XBAR filter design.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.35848/1347-4065/ac9569
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2022
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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