In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 27, No. 11 ( 2021-11), p. 3967-3975
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-019-04595-w
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2021
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X
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