In:
Journal of Micro/Nanolithography, MEMS, and MOEMS, SPIE-Intl Soc Optical Eng, Vol. 15, No. 1 ( 2016-02-01), p. 013502-
Type of Medium:
Online Resource
ISSN:
1932-5150
DOI:
10.1117/1.JMM.15.1.013502
Language:
English
Publisher:
SPIE-Intl Soc Optical Eng
Publication Date:
2016
detail.hit.zdb_id:
3056313-6
Permalink