In:
Inorganic Chemistry Frontiers, Royal Society of Chemistry (RSC), Vol. 10, No. 15 ( 2023), p. 4503-4509
Abstract:
The development of novel low- κ ( κ 〈 2.4) dielectric materials as interlayer dielectrics (ILDs) to solve crosstalk noise in integrated circuits is of great significance. Hydrogen-bonded organic frameworks (HOFs) have great potential as a promising new class of low-dielectric material. In this work, based on triangular N 1 , N 3 , N 5 -tris(quinolin-6-yl)benzene-1,3,5-tricarboxamide (TQBTC), two new HOFs (HOF-FJU-56 and HOF-FJU-57) have been synthesized at different temperatures for ILDs. They have different porosities caused by various stacking modes of TQBTC. HOF-FJU-57a, which has larger porosity, exhibits a lower dielectric constant of 2.12 at 1 MHz and room temperature. Moreover, HOF-FJU-57a exhibits high thermal stability of its dielectric constant (13 K to 413 K) and ultralow leakage current (∼10 −13 A mm −2 at 0.5 kV cm −1 ) as a dielectric. These studies show that HOFs have great potential as a promising new class of low-dielectric material.
Type of Medium:
Online Resource
ISSN:
2052-1553
Language:
English
Publisher:
Royal Society of Chemistry (RSC)
Publication Date:
2023
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