In:
Applied Optics, Optica Publishing Group, Vol. 60, No. 8 ( 2021-03-10), p. 2118-
Abstract:
Subsurface damage (SSD) induced during conventional manufacturing of
optics contributes mainly to a reduction in the performance and quality of optics. In this paper, we propose the application of
full-field optical coherence tomography (FF-OCT) as a high-resolution and nondestructive method for evaluation of SSD in optical substrates.
Both ground and polished surfaces can be successfully imaged, providing a path to control SSD throughout the entire optics
manufacturing process chain. Full tomograms are acquired for qualitative and quantitative analyses of both surface and SSD. The
main requirements for the detection of SSD are addressed. Data processing allows the removal of low-intensity image errors and the
automatic evaluation of SSD depths. OCT scans are carried out on destructively referenced glass samples and compared to existing
predictive models, validating the obtained results. Finally, intensity projection methods and depth maps are applied to characterize crack
morphologies. The experiments highlight differences in crack characteristics between optical glasses SF6 and HPFS7980 and
illustrate that wet etching can enhance three-dimensional imaging of SSD with FF-OCT.
Type of Medium:
Online Resource
ISSN:
1559-128X
,
2155-3165
Language:
English
Publisher:
Optica Publishing Group
Publication Date:
2021
detail.hit.zdb_id:
207387-0
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