In:
Journal of the Japan Institute of Metals and Materials, Japan Institute of Metals, Vol. 61, No. 1 ( 1997), p. 71-76
Type of Medium:
Online Resource
ISSN:
0021-4876
,
1880-6880
Uniform Title:
酸素雰囲気下でのタンタルターゲットのレーザアブレーションによるTa〈SUB〉2〈/SUB〉O〈SUB〉5〈/SUB〉薄膜の形成
DOI:
10.2320/jinstmet1952.61.1_71
Language:
English
,
Japanese
Publisher:
Japan Institute of Metals
Publication Date:
1997
detail.hit.zdb_id:
160493-4
detail.hit.zdb_id:
2218481-8
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