In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 44, No. 5S ( 2005-05-01), p. 3416-
Abstract:
A focusing waveguide grating coupler made of hydrogen silsesquioxane is fabricated successfully. The size of the focusing grating coupler is 1 mm×1 mm and the total device size is 8 mm×2 mm. The numerical aperture and the minimum line width of the device are 0.85 and 85 nm, respectively. The spot size of this coupler is 335 nm for blue laser and the out-coupling efficiency is 25.7%.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.44.3416
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2005
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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