In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 31, No. 1 ( 2022-2), p. 45-53
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2021.3125377
DOI:
10.1109/JMEMS.2021.3125377/mm1
DOI:
10.1109/JMEMS.2021.3125377/mm2
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2022
detail.hit.zdb_id:
2027726-X
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