In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 32, No. 9S ( 1993-09-01), p. 4163-
Abstract:
Lead zirconate titanate (PZT) films with the composition of Pb(Zr x Ti 1- x )O 3 ( x : 0.2-0.8) were fabricated by dip-coating methods. The sol was prepared using ethanolamine as a sol stabilizer. The substrate was In 2 O 3 :Sn (ITO) sputtered glass (Corning #7059). PZT was well crystallized by heating at 600°C. After heating, the interface between PZT and ITO was investigated in structural, chemical, and electrical respects. These tests revealed that there is no reaction layer or diffusion layer between the interface. The dielectric constant and loss factor of the films were measured against temperature. From the D-E hysteresis curves, the films were confirmed to be ferroelectric with P r =5 µC/cm 2 and E c =85 kV/cm.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.32.4163
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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