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  • 1
    Online Resource
    Online Resource
    A New Technique for Via Plugging through the Selective Chemical Vapor Deposition of Aluminum
    IOP Publishing ; 1997
    In:  Japanese Journal of Applied Physics Vol. 36, No. 2R ( 1997-02-01), p. 657-
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 2R ( 1997-02-01), p. 657-
    Abstract: A new technique for selective via plugging in order to obtain perfectly planarized multilevel metallization is demonstrated through the chemical vapor deposition (CVD) of aluminum. It has been found that the selectivity between aluminum and silicon oxide can be enhanced by sputter-deposition of ultrathin layers of palladium and cobalt on aluminum interconnection lines prior to patterning of via holes. It was found that the coating of aluminum oxide with these noble metals was mainly responsible for the selectivity enhancement. This new technique was demonstrated to be highly suitable for actual device fabrication.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.36.657
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 1997
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 2
    Online Resource
    Online Resource
    A Novel Micromachining Technique to Fabricate Released GaAs Microstructures with a Rectangular Cross Section
    IOP Publishing ; 2003
    In:  Japanese Journal of Applied Physics Vol. 42, No. Part 1, No. 1 ( 2003-1-15), p. 326-332
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 42, No. Part 1, No. 1 ( 2003-1-15), p. 326-332
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.42.326
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: English
    Publisher: IOP Publishing
    Publication Date: 2003
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 3
    Online Resource
    Online Resource
    Scanning Rapid Thermal Annealing Process for Poly Silicon Thin Film Transistor
    IOP Publishing ; 2000
    In:  Japanese Journal of Applied Physics Vol. 39, No. 10R ( 2000-10-01), p. 5773-
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 10R ( 2000-10-01), p. 5773-
    Abstract: Polycrystalline silicon (poly-Si) thin-film transistors (TFTs) were fabricated on transparent glass substrates using lamp-scan rapid thermal annealing. Scan-radiation-annealed silicon islands were crystallized by metal-induced lateral crystallization (MILC). The activation energy of Ni-MILC was calculated to be 1.56 eV. In order to enhance the MILC rate, we deposited a capping SiO 2 layer over the self-aligned TFT, which was found to increase the MILC rate several times. Thus fabricated TFTs exhibited different electrical characteristics depending on the annealing conditions.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.39.5773
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 4
    Online Resource
    Online Resource
    Novel Triode-Type Field Emission Arrays and Appropriate Driving Method for Flat Lamp Using Carbon Nanofibers Grown by Plasma Enhanced Chemical Vapor Deposition
    IOP Publishing ; 2007
    In:  Japanese Journal of Applied Physics Vol. 46, No. 7A ( 2007-7-4), p. 4381-4385
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 46, No. 7A ( 2007-7-4), p. 4381-4385
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.46.4381
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: English
    Publisher: IOP Publishing
    Publication Date: 2007
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 5
    Online Resource
    Online Resource
    Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer
    IOP Publishing ; 2007
    In:  Journal of Micromechanics and Microengineering Vol. 17, No. 8 ( 2007-08-01), p. 1533-1541
    Details
    In: Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 17, No. 8 ( 2007-08-01), p. 1533-1541
    Type of Medium: Online Resource
    ISSN: 0960-1317 , 1361-6439
    URL: Article
    DOI: 10.1088/0960-1317/17/8/016
    RVK:
    ZG 1100
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2007
    detail.hit.zdb_id: 1480280-6
    detail.hit.zdb_id: 1069644-1
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  • 6
    Online Resource
    Online Resource
    Effects of Substrate Surface Topology on NiFe/Cu/Co Spin Valve Characteristics
    IOP Publishing ; 2000
    In:  Japanese Journal of Applied Physics Vol. 39, No. 8R ( 2000-08-01), p. 4767-
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 8R ( 2000-08-01), p. 4767-
    Abstract: In order to control the crystallinity of sputter-deposited NiFe/Cu/Co spin valve thin films, surface topology of 4°tilt-cut Si(111) substrates was modified in various ways prior to formation of the spin valves. In case of the mirror polished substrate, NiFe and Co showed fcc (110) preferred orientation with in-plane uniaxial magnetic anisotropy. The easy axes of these magnetic layers were aligned in 90° to each other and giant magnetoresistance (GMR) was measured to be 4.5% at room temperature. The spin valves formed on the amorphized substrate by Ar ion mass doping, however, did not show magnetic anisotropy due to the loss of crystallinity and no appreciable GMR could be observed. The spin valves deposited on the unpolished substrate, of which the average surface roughness was measured to be a few microns, turned out to show a sound multilayeredness as well as crystallinity, but GMR was reduced to 3.5%. Tailing in the magnetoresistance ( R – H ) curve occurred in the spin valves formed on the unpolished substrate, and it was thought to be attributed to the shape anisotropy related to the interface roughness of the films. Detailed discussion on the relationship between GMR and crystallinity of the magnetic layers has been made with the results of simple simulation.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.39.4767
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2000
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 7
    Online Resource
    Online Resource
    Characteristics of the Oxidation Barrier Layers for Copper Metallization
    IOP Publishing ; 1995
    In:  Japanese Journal of Applied Physics Vol. 34, No. 2S ( 1995-02-01), p. 1016-
    Details
    In: Japanese Journal of Applied Physics, IOP Publishing, Vol. 34, No. 2S ( 1995-02-01), p. 1016-
    Abstract: Characteristics of the oxidation barrier layers for copper metallization were investigated. Thin films of Cr, TiN and Al were used as the oxidation barrier layers for Cu. Ultrathin Al film was found to prevent the oxidation of Cu up to the highest annealing temperature (600° C) among the barriers layers tested in this study. Topographical features of Cu\Al film were better than those of Cu\Cr and Cu\TiN after an oxidation annealing treatment. It was found that oxygen did not diffuse into Cu because of the ultrathin Al 2 O 3 layer formed on the Cu surface, and consequently ultra thin (25 Å) Al film could be a good oxidation barrier layer for Cu metallization.
    Type of Medium: Online Resource
    ISSN: 0021-4922 , 1347-4065
    URL: Article
    DOI: 10.1143/JJAP.34.1016
    RVK:
    UA 4210.1
    RVK:
    UA 4210.2
    RVK:
    UA 4210
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 1995
    detail.hit.zdb_id: 218223-3
    detail.hit.zdb_id: 797294-5
    detail.hit.zdb_id: 2006801-3
    detail.hit.zdb_id: 797295-7
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  • 8
    Online Resource
    Online Resource
    Future changes in extreme heatwaves in terms of intensity and duration over the CORDEX-East Asia Phase Two domain using multi-GCM and multi-RCM chains
    IOP Publishing ; 2023
    In:  Environmental Research Letters Vol. 18, No. 3 ( 2023-03-01), p. 034007-
    Details
    In: Environmental Research Letters, IOP Publishing, Vol. 18, No. 3 ( 2023-03-01), p. 034007-
    Abstract: An extreme heatwave, in terms of intensity and duration, is projected to occur at the end of the 21st century (2071–2100) over the whole of East Asia. The projection is calculated using daily maximum temperature data of 25 km horizontal resolution produced by 12 general circulation model-regional climate model chains participating in the CORDEX-East Asia Phase 2 project. An ‘extreme’ heatwave is defined as one in which the heatwave magnitude (HWM), which is the accumulated daily intensity of a heatwave during the heatwave period, is higher than the 95th percentile of the HWM for the reference period (1981–2005). In historical simulations, heatwaves have occurred mainly from April to June in India, in April and May in Indochina, from June to August in China and Mongolia, and in July and August in the Korean Peninsula and Japan; most heatwaves last three to four days. In India and Indochina, long-lasting and intense heatwaves occur more often than in other regions. In future, heatwave intensity will increase, the average duration of heatwaves will be approximately two to three weeks, and the heatwave season will be lengthened. Therefore, extreme heatwaves will occur more frequently and strongly. Under two representative concentration pathway scenarios (RCP2.6 and RCP8.5) and two shared socioeconomic pathway scenarios (SSP1-2.6 and SSP5-8.5), the proportion of extreme heatwaves to all heatwave events will increase from 5.0% (historical) to 8.0%, 20.8%, 19.3%, and 36.3%, and the HWM of the extreme heatwave will be 1.4, 3.5, 3.0, and 9.0 times stronger, respectively. The main reason for the increase in the HWM of extreme heatwaves is the increased duration rather than the daily intensity of the heatwaves. In East Asia, the temporal and regional disparities of heatwave damage will be much more prominent as extreme heatwaves become stronger and more frequent in these regions and during the periods that are more affected by heatwaves in the present day.
    Type of Medium: Online Resource
    ISSN: 1748-9326
    URL: Article
    DOI: 10.1088/1748-9326/acb727
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2023
    detail.hit.zdb_id: 2255379-4
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  • 9
    Online Resource
    Online Resource
    Human influence on frequency of temperature extremes
    IOP Publishing ; 2020
    In:  Environmental Research Letters Vol. 15, No. 6 ( 2020-06-01), p. 064014-
    Details
    In: Environmental Research Letters, IOP Publishing, Vol. 15, No. 6 ( 2020-06-01), p. 064014-
    Abstract: We investigate the influence of external forcings on the frequency of temperature extremes over land at the global and continental scales by comparing HadEX3 observations and simulations from the Coupled Model Intercomparison Programme Phase 6 (CMIP6) project. We consider four metrics including warm days and nights (TX90p and TN90p) and cold days and nights (TX10p and TN10p). The observational dataset during 1951–2018 shows continued increases in the warm days and nights and decreases in the cold days and nights in most land areas in the years after 2010. The area of the so-called ‘warming hole’ in North America is much reduced in 1951–2018 compared with that in 1951–2010. The comparison between observation and simulations based on an optimal fingerprinting method shows that the anthropogenic forcing, dominated by greenhouse gases, plays the most important role in the changes of the frequency indices. Changes in CMIP6 multi-model mean response to all forcing need to be scaled down to best match the observations, indicating that the multi-model ensemble mean may have overestimated the observed changes. Analyses that involve signals from anthropogenic and natural external forcings confirm that the anthropogenic signal can be detected over global land as a whole and for most continents in all temperature indices. Analyses that include signals from greenhouse gas (GHG), anthropogenic aerosol (AA) and natural external (NAT) forcings show that the GHG signal is detected in all indices over the globe and most continents while the AA signal can be detected mainly in the warm extremes but not the cold extremes over the globe and most continents. The effect of NAT is negligible in most land areas. GHG’s warming effect is offset partially by AA’s cooling effect. The combined effects from both explain most of the observed changes over the globe and continents.
    Type of Medium: Online Resource
    ISSN: 1748-9326
    URL: Article
    DOI: 10.1088/1748-9326/ab8497
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2020
    detail.hit.zdb_id: 2255379-4
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  • 10
    Online Resource
    Online Resource
    Uncertainty analysis of future summer monsoon duration and area over East Asia using a multi-GCM/multi-RCM ensemble
    IOP Publishing ; 2023
    In:  Environmental Research Letters Vol. 18, No. 6 ( 2023-06-01), p. 064026-
    Details
    In: Environmental Research Letters, IOP Publishing, Vol. 18, No. 6 ( 2023-06-01), p. 064026-
    Abstract: This study examines the spatiotemporal characteristics of the summer monsoon rainy season over East Asia using six regional climate models (RCMs) participating in the Coordinated Regional Domain Experiment (CORDEX) East Asia Phase II project. The framework combining multiple global climate models (GCMs) with multiple RCMs produces a larger spread in summer monsoon characteristics than driving GCMs only, enabling a better quantification of uncertainty factors. On average, the RCM simulations reproduce the observed summer monsoon duration and area better than the corresponding boundary GCMs, implying the added values of downscaling. Both the area and duration of the East Asian summer monsoon are projected to increase by the late 21st century, more strongly in high emission scenarios than in low emission scenarios, particularly in China. Different responses between scenarios, which indicate warming mitigation benefits, only become significant in the late 21st century due to large intersimulation uncertainties. Analysis of variance results show that uncertainty in future monsoon area and duration is larger between boundary GCMs than between RCMs over East Asia and its coastal subregions. A strong intersimulation relationship between RCMs and GCMs supports that boundary GCMs substantially diversify downscaled RCM projections through different climate sensitivities. Furthermore, the distinct subregional responses in future monsoon area and duration emphasize the importance of fine-resolution projections with appropriate uncertainty measures for better preparing region-specific adaptation plans.
    Type of Medium: Online Resource
    ISSN: 1748-9326
    URL: Article
    DOI: 10.1088/1748-9326/acd208
    Language: Unknown
    Publisher: IOP Publishing
    Publication Date: 2023
    detail.hit.zdb_id: 2255379-4
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