In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 12S ( 1991-12-01), p. 3580-
Abstract:
We present a new experimental approach to using intrinsic gettering to remove Fe impurities. We annealed samples, followed by quenching, and measured the Fe concentration near the surface using deep-level transient spectroscopy. The supersaturation of Fe impurities is necessary for the intrinsic gettering of Fe. However, for a higher supersaturation, Fe impurities precipitate faster than gettering. The optimum degree of supersaturation is one order of magnitude. Gettering is limited by the reaction of Fe with the oxygen precipitates in the defect region, rather than by Fe diffusion to the defect region.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.3580
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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