Online Resource
Elsevier BV
;
2003
In:
Microelectronic Engineering Vol. 67-68 ( 2003-6), p. 487-494
In:
Microelectronic Engineering, Elsevier BV, Vol. 67-68 ( 2003-6), p. 487-494
Type of Medium:
Online Resource
ISSN:
0167-9317
DOI:
10.1016/S0167-9317(03)00105-9
Language:
English
Publisher:
Elsevier BV
Publication Date:
2003
detail.hit.zdb_id:
1497065-X
detail.hit.zdb_id:
605230-7
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