In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 33, No. 10R ( 1994-10-01), p. 5950-
Abstract:
Plasma production by rf fields in the helicon wave
frequency range is investigated by using the rotating field antenna which can select the azimuthal
mode number of the applied rf. The calculated dispersion relation shows that
the m = -1 mode helicon wave propagates whereas the m =+1 mode helicon wave is cut off.
The produced helium plasma density in the case of the m =
-1 mode rf application is 1 ×10 13 cm -3 , which is
more than 5 times greater than in the case of the m = +1
mode rf application. The two-dimensional numerical simulation of the rf
plasma production also qualitatively gives the same result as in the experiment.
The plasma for the m = +1 mode rf is sustained
by the antenna near field, while for the m = -1 mode rf, it is sustained by the
power absorption from the propagating helicon wave.
From both the experiment and the simulation, the helicon wave is revealed to increase the plasma density
from the order of 10 12 cm -3 to 10 13 cm -3 by efficient power deposition to electrons.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.33.5950
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1994
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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