In:
Chinese Journal of Liquid Crystals and Displays, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Vol. 34, No. 2 ( 2019), p. 119-124
Type of Medium:
Online Resource
ISSN:
1007-2780
Uniform Title:
ECCP干法刻蚀条件下的TFT基板绝缘层过孔腐蚀的改善
DOI:
10.3788/YJYXS/2019/34/2
DOI:
10.3788/YJYXS20193402.0119
Language:
English
,
Chinese
Publisher:
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Publication Date:
2019
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