In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 18, No. 5 ( 2000-09-01), p. 2213-2216
Abstract:
Positive ions from the near-cathode region in a wire-plate high-voltage pulsed corona discharge nitrogen plasma were characterized using a molecular beam mass spectrometer under severe electromagnetic interference. The N+ current is 2–8 times greater than that of N2+ at N2 pressure of 5–25 Torr, peak voltage of 4–10 kV, and repetition rate of 10–70 Hz. The nitrogen ion signals rise with increasing peak voltage and repetition rate of pulsed discharge, but exhibit a clear peak over the N2 pressure range studied. The kinetics of the physicochemical processes involved in the earlier N2 plasma has been studied. Nitrogen ion generation near the corona wire area and migration path to the cathode plate are the key areas in the understanding the phenomenon and mechanisms that are involved.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2000
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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