ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The solid-state reactions between (100) GaAs substrates and Rh films ∼150 A(ring) and ∼600 A(ring) thick, annealed at temperatures between 300 and 800 °C, are investigated with conventional and heavy ion Rutherford backscattering spectrometry, and x-ray diffraction. Initiation of interface reactions between the Rh films and the GaAs substrate is observed at ∼300 °C. Laterally segregated RhGa, RhAs, and RhAs2 phases are detected for the 150-A(ring) Rh/GaAs contact annealed in the temperature range of 300–700 °C. For thick Rh film (∼600 A(ring)) on GaAs, vertical phase separation between the RhGa and the Rh-As phases is observed after annealing. After annealing at 700 °C for 20 min, the reaction between the 600-A(ring) Rh film and GaAs is complete and a layer sequence of RhGa/RhAs2/GaAs results. Electrical properties of Rh/n-GaAs diodes are measured using the current voltage dependence. A correlation between the electrical behavior and the metallurgical reaction is observed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.338205
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