In:
Journal of Applied Physics, AIP Publishing, Vol. 106, No. 12 ( 2009-12-15)
Abstract:
The thickness, refractive index, density, and interface properties of thin thermal oxides on both Si- and C-terminated 4H-SiC faces were investigated by ellipsometry using optical models of increasing complexity. We used different parametrizations of the dielectric function, a transition layer, and also investigated the multisample approach. The thickness of the transition layer increases with decreasing oxide thickness below the layer thickness of about 30nm, it correlates with the surface roughness measured by atomic force microscopy, and it was found to be significantly larger for the C-terminated than that for the Si-terminated face. For oxide layer thicknesses larger than 30nm, the refractive index of the bulk oxide layer is the same as that of thermal SiO2 on Si. We found an apparent decrease in mass density (as well as optical density) with decreasing oxide thickness using a combination of ellipsometry and backscattering spectrometry, which can be explained by the surface roughness, depending on the layer thickness revealed by atomic force microscopy.
Type of Medium:
Online Resource
ISSN:
0021-8979
,
1089-7550
Language:
English
Publisher:
AIP Publishing
Publication Date:
2009
detail.hit.zdb_id:
220641-9
detail.hit.zdb_id:
3112-4
detail.hit.zdb_id:
1476463-5
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