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  • AIP Publishing  (3)
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  • AIP Publishing  (3)
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  • 1
    In: Review of Scientific Instruments, AIP Publishing, Vol. 91, No. 8 ( 2020-08-01)
    Abstract: We propose a test method to study the effects of strain on the thermal conductivity of thin films. First, a strain setup was designed to apply stress to a thin film, and a test system was built to measure its thermal conductivity by combining the strain setup with the 3-ω method. The strain setup can apply stress to the specimen by adjusting load weights, while the strain of a thin film was obtained by measuring the applied stress with a force sensor. Second, the effects of strain on the resistance and temperature coefficients of a metal thin film were studied using the strain setup and the four-wire resistance measurement method; the results show that the resistance and temperature coefficients of metal thin films decrease with strain. Finally, the effects of strain on the thermal conductivity of a silicon dioxide thin film and silicon substrate were studied using the proposed method and test system. As the strain increased from 0% to 0.072%, the thermal conductivity of the 300-nm thick silicon dioxide thin film decreased from 0.907 W/(m K) to 0.817 W/(m K). The thermal conductivity of the 0.5-mm thick silicon substrate fluctuated in the range of 130.6 W/(m K) to 118.8 W/(m K) and then tended to stabilize around 126.4 W/(m K).
    Type of Medium: Online Resource
    ISSN: 0034-6748 , 1089-7623
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2020
    detail.hit.zdb_id: 209865-9
    detail.hit.zdb_id: 1472905-2
    SSG: 11
    Location Call Number Limitation Availability
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  • 2
    Online Resource
    Online Resource
    AIP Publishing ; 2019
    In:  Review of Scientific Instruments Vol. 90, No. 10 ( 2019-10-01)
    In: Review of Scientific Instruments, AIP Publishing, Vol. 90, No. 10 ( 2019-10-01)
    Abstract: A setup was designed based on the 3-ω method to study the effect of strain on the thermal conductivity of thin films deposited on a substrate. Mathematical parameters such as the applied strain on the films, dimensions of the setup, and the loading displacement were derived. Based on the setup, the test system was built and the influence of air on the results of the 3-ω method in a nonvacuum environment was analyzed. To verify the test system, we deposited a SiO2 thin film of 487 nm on a substrate and measured its thermal conductivity at 289.7 K under different strains. The results indicated that the thermal conductivity decreases from 1.07 W/(m K) at zero strain to 0.92 W/(m K) at about 0.14% tensile strain.
    Type of Medium: Online Resource
    ISSN: 0034-6748 , 1089-7623
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2019
    detail.hit.zdb_id: 209865-9
    detail.hit.zdb_id: 1472905-2
    SSG: 11
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
  • 3
    Online Resource
    Online Resource
    AIP Publishing ; 2019
    In:  Review of Scientific Instruments Vol. 90, No. 6 ( 2019-06-01)
    In: Review of Scientific Instruments, AIP Publishing, Vol. 90, No. 6 ( 2019-06-01)
    Abstract: A potentiometric sulfur dioxide (SO2) gas sensor based on the Li3PO4-Li2SiO3 solid electrolyte thin film was developed. The sensor was based on a galvanic cell O2, SO2, Au, Li2SO4-V2O5|Li3PO4-Li2SiO3|Au, SO2, O2. The Li3PO4-Li2SiO3 thin film was deposited on the Al2O3 substrate by RF magnetron sputtering, and the Au patterns were fabricated as the electrodes. The sensing electrode materials of Li2SO4-V2O5 with different dopants TiO2 and MgO were prepared, and as the ratio of Li2SO4:TiO2 is 1:1 (mol) with 5 wt. % V2O5 and 5 wt. % MgO, the sensor showed relatively good response characteristics to SO2 at 450 °C. Then, the sensor was further tested at the working temperature from 400 °C to 500 °C. The results show that the sensor has good response to SO2 at 400–450 °C, and the sensitivity is 90.15–57.19 mV/dec. The response and recovery times are 20–40 s and 2.5–4 min, respectively, when the gas concentration of SO2 increases from 10 ppm to 100 ppm and then decreases to 10 ppm. At 425 °C, the sensitivity is close to the theoretical values, and the final recovery potential of the sensor is almost consistent with the initial potential.
    Type of Medium: Online Resource
    ISSN: 0034-6748 , 1089-7623
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2019
    detail.hit.zdb_id: 209865-9
    detail.hit.zdb_id: 1472905-2
    SSG: 11
    Location Call Number Limitation Availability
    BibTip Others were also interested in ...
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