In:
The Proceedings of The Computational Mechanics Conference, Japan Society of Mechanical Engineers, Vol. 2009.22, No. 0 ( 2009), p. 540-541
Type of Medium:
Online Resource
ISSN:
2424-2799
Uniform Title:
1604 FEMによるシリコンウェーハ熱処理時のスリップ発生の予測(OS16.シリコン強度とシミュレーション,オーガナイズドセッション)
DOI:
10.1299/jsmecmd.2009.22.540
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2009
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