In:
Applied Physics Letters, AIP Publishing, Vol. 45, No. 3 ( 1984-08-01), p. 251-252
Abstract:
Soft x-ray absorption spectra and spectral sensitivity of x-ray resist, poly-2-methylpentene-1-sulfone, are studied using synchrotron radiation. Shape resonance around the S2p edge and chemical shift among C1s levels are observed in the absorption spectra. The degradation efficiency of the resist is found to vary with incident photon wavelength.
Type of Medium:
Online Resource
ISSN:
0003-6951
,
1077-3118
Language:
English
Publisher:
AIP Publishing
Publication Date:
1984
detail.hit.zdb_id:
211245-0
detail.hit.zdb_id:
1469436-0
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