In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 2, No. 4 ( 1984-10-01), p. 1448-1452
Abstract:
The influence of an O2 atmosphere on oxygen-isotope analysis by means of secondary ion mass spectrometry (SIMS) was studied in detail using various standard metal oxides enriched with a stable isotope18O. The secondary ion intensities of 16O− and 18O− were examined under different 16O-oxygen pressures and primary Ar+ beam currents. The deviation in the isotope ratio became prominent at an oxygen pressure over about 1×10−4 Pa, and in the sequence of CuO & lt;ZnO & lt;NiO, Co3O4 & lt;Cr2O3 & lt;TiO2. A decrease in beam current resulted in the enhancement of this oxygen effect. When pure metals such as Cu, Zn, Ni, Co, Cr, and Ti were sputtered in an 16O2 atmosphere, the secondary ion intensities of 16O− changed with oxygen pressures in a similar way to those of 16O− emitted from 18O-oxides consisting of the corresponding metal atoms. It was shown that the oxygen effects among the oxides are closely related to the bonding strength between metal and oxygen atoms; the stronger interaction being responsible for the larger oxygen effects.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
1984
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
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