In:
Acta Physica Sinica, Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, Vol. 38, No. 7 ( 1989), p. 1111-
Abstract:
In this paper, we present a new method for calculation of depth profiles of implanted ions in multilayer materials. It combines the Monte Carlo simulation method with the method of numerical solution of the LSS transport equation. Taking into account the reflection of the ions at the interfaces of the layers the analytical expression of the range distribution in the multilayer materials is obtained. The comparison between the theoretical and the experimental results is made and good agreement is shown.
Type of Medium:
Online Resource
ISSN:
1000-3290
,
1000-3290
Language:
Unknown
Publisher:
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Publication Date:
1989
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