In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 27, No. 4A ( 1988-04-01), p. L639-
Abstract:
A mechanism of compositional deviation of Ba-Y-Cu-O films during sputtering has been investigated, and a process for obtaining as-deposited superconducting films from a stoichiometric target has been developed. The main factor of the deviation is the radiation of high-energy electrons emitted from the oxide target with a low work function onto the growing surface. By eliminating the electron bombardment, films with the same composition were obtained reproducibly. As-grown films 4000 Å thick deposited at 580°C showed T c ( ρ=0) of 82.5 K and an excellent surface smoothness.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.27.L639
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1988
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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