In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 24, No. 11R ( 1985-11-01), p. 1432-
Abstract:
A pure methane discharge under a toroidal magnetic field has been used to deposit thin carbon layers in situ onto the walls of a toroidal vessel, with a view to application to magnetic fusion devices. Hard carbon films with high electrical resistivity were formed on stainless steel, silicon, and NaCl substrates, in a wide range of methane pressure (10 -4 ∼10 -2 Torr). The film properties and structures were examined by infrared absorption, X-ray photoemission analysis, electron microscopy (TEM, TED, SUM), and so forth. The results show that the films predominantly consist of tetrahedrally bonded carbon (sp 3 bonding). Both the hydrogen atom concentration in the films and the binding energy of the carbon atoms increase with increasing methane pressure. Also, the size of microcrystallites on a background consisting of an amorphous structure grows with increasing pressure.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.24.1432
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1985
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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